PATENTS
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ISO 14001 -
ISO 9001 -
10-2211922 -
10-2064901 -
10-1972793 -
10-1964874 -
10-1964871 -
10-1964869
CERTIFICATES
| Patent Title | Number |
|---|---|
| Temperature sensor and temperature measuring device using SAW and real-time passive temperature measurement system | 10-2211922 |
| Wireless temperature sensor system for detecting semiconductor process conditions | 10-2064901 |
| Passive type of wafer-level packaging for semiconductor chamber temperature measurement | 10-1972793 |
| Temperature sensor using SAW | 10-1964874 |
| Real-time passive temperature measurement method using SAW temperature sensor | 10-1964871 |
| Measurement temperature receiving system by SAW temperature sensor | 10-1964869 |
| Protrusion type SAW temperature sensor | 10-1964868 |
| Curved fastening SAW temperature sensor | 10-1964865 |
| Temperature sensor and temperature measuring instrument using SAW | 10-1655869 |
| Single-layer or multi-layer reflector deposition device | 10-1493718 |
| Packaging method of high-frequency filter | 10-1410242 |
| Frequency calibration method of high-frequency filter | 10-1410241 |
| Frequency correction method of high-frequency filter using plasma | 10-1358674 |
| Manufacturing method of high-frequency filter | 10-1360756 |
| Radiation detection module using thin film deposition system | 10-1302966 |